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(S)TEM JEOL 2200 FS

Transmission electron microscopy

JEOL

2200 FS

View

4pointes_ligne_02

Electrical characterization

n042A(inv)

View

4pointes_ligne_formation

Electrical characterization

n079A(inv)

View

Advanced_Vacuum_RIE

Dry etching

Advanced_Vacuum

320

View

AET_RTA

Thermal processes

AET

View

AFM Park_NX10

Atomic force microscopy

Park

NX10

View

Agilent_5500ls_Pico_Plus

Atomic force microscopy

Agilent

5500ls_Pico_Plus

View

Alcatel_Evap_BEL_310

Metallic thin film deposition

Alcatel

Evap_BEL_310

View

Alcatel_Evap_SCM_600

Metallic thin film deposition

Alcatel

Evap_SCM_600

View

ALD_Fiji_200

Dielectric thin film deposition

Cambridge_Nanotech

Fiji_F200

View

Alliance_Concept_AC450

Metallic thin film deposition

Alliance Concept

AC450

View

ApSy_PECVD_Multiplex_V1

Dielectric thin film deposition

ApSy

PECVD_Multiplex_V1

View

Astemec_Sputter_W_formation

Metallic thin film deposition

Astemec

Sputter_formation

View

Bruker_DI3100

Atomic force microscopy

Bruker

DI3100

View

Bruker_ICON

Atomic force microscopy

Bruker

ICON

View

Buehler_Polishing_system

Polishing

Buehler

View

CAIBE

Dry etching

C2N

CAIBE

View

CCP-RIE_STS_Formation

Dry etching

Plassys

View

cluster-tool UHV CBE

Epitaxy

Home made

View

cluster-tool UHV CVD

Epitaxy

Home Made

View

Contact_angle

Physico-Chemical Characterization

View

Critical_point_dryer

Alternative and emergent lithography

Tousimis

Autosamdri_931_2_5

View

CVD graphène

Epitaxy

Aixtron

Black Magic

View

CVD_graphene_SiC

Epitaxy

Qtherm

View

CVD_mat2D

Epitaxy

Nabertherm

View

D224_S10_BackEnd_Wetbench

Wet process benches

Axima

backEnd

View

Denton_Co_Sputter_Explorer_14

Metallic thin film deposition

Denton

Co_Sputter_Explorer_14

View

Denton_Evap_UHV

Metallic thin film deposition

Denton

Evap_UHV

View

Diener_Descum_Nano

Dry etching

Diener

Nano

View

Diener_Descum_Pico

Dry etching

Diener

Pico

View

Disco_Dicing_saw_DAD641

Back end / dicing

Disco

Dicing_saw_DAD641

View

E1402_S01_Spin_Coating

Formation_litho

Axima

Spin_Coat

View

E1402_S02_Dvlpt_resist_optic

Formation_litho

Axima

Development_Resists

View

E1402_S03_Dvlpt_resist_electronic_solvant

Formation_litho

Axima

Solvant_Bench

View

E1403_S01_Solvant_Cleaning

Formation_chimie

Axima

Solvant_Bench

View

E1403_S02_Acid_HF_Cleaning

Formation_chimie

Axima

HF_Bench

View

E1403_S03_Acid_Wet_Etching

Formation_chimie

Axima

Acid_Wet_Etch

View

E15_S02_Heavy_Chemistry_Acid_Wetbench

Wet process benches

Axima

Acid_Wetbench

View

E161_S01_Fine_Chemistry_Acid

Epitaxy

Axima

wetbench

View

E32_S01_Spin_EBL_HSQ

Focused beam lithography

Suss

Spin_HSQ_only

View

E32_S01_Spin_EBL_PMMA

Focused beam lithography

Suss

Spin_PMMA_Zep_CSAR

View

E32_S02_Dvlpt_resist_ebl_solvent

Focused beam lithography

Axima

Development_ebl_resists_w_solvent

View

E331_S01_Dvlpt_resist

Wet Benches

Dvlpt_resist

View

E331_S02_Dvlpt_resist

Wet Benches

Axima

Development_resists_w_base

View

E332_S01_Dvlpt_SU8_BCB

Wet Benches

Axima

Dvlpt_SU8_BCB

View

E332_S02_recuit_lent

Wet Benches

Axima

recuit_lent

View

E333_S01_Cleaning_Prep

Wet Benches

Cleaning_Prep

View

E333_S02_Spin_BCB

Wet Benches

Axima

Solvent

View

E333_S02_Spin_BCB

Wet Benches

Axima

Spin_BCB

View

E333_S03_Spin_Litho_UV

Wet Benches

Suss

Litho_UV

View

E333_S04_Su8

Wet Benches

Axima

Su8

View

E333_S05_Spin_HMDS

Wet Benches

Axima

SU8

View

E91_S01_Chem1_Metal_Wet_Etch_No_HF

Wet Benches

Axima

Metal Wet etching no HF

View

E91_S02_Chem1_Lift_Off

Wet Benches

Axima

Lift Off

View

E91_S03_Chem1_III_V_comp _Acid

Wet Benches

Axima

III_V_Compatible_Acid

View

E91_S04_Chem1_III_V_comp _Acid_HF

Wet Benches

Axima

III_V_Compatible_Acid_with_HF

View

E91_S05_Chem1_III_V_comp _Solvent

Wet Benches

Axima

III_V_Compatible_Solvent

View

E91_S07_Chem1_III_V_comp _Acid

Wet Benches

Axima

III_V_Compatible_Solvent

View

E92_S01_Chem2_Electrochemistry

Wet Benches

Axima

Electrochemistry

View

E92_S02_Chem2_Electrochemistry

Wet Benches

Axima

Electrochemistry

View

E92_S03_Chem2_Electrochemistry

Wet Benches

Axima

Electrochemistry

View

E92_S04_Chem2_HF_Vapor_HF

Wet Benches

Axima

HF_vapor_HF

View

E92_S05_Chem2_KOH_TMAH_H3PO4

Wet Benches

Axima

KOH_TMAH_H3PO4

View

E93_S01_Acid_Wetbench

Wet Benches

Axima

Acid_Wetbench

View

E93_S02_Solvent_Wetbench

Wet Benches

Axima

Solvent_Wetbench

View

E93_S03_Chem3_Si_comp _Acid_No_HF

Wet Benches

Axima

Si_compatible_Acid_No_HF

View

E93_S04_Chem3_Nanomaterials_Spin

Wet Benches

Axima

Nanomaterials and spin coater dedicated

View

E93_S05_Chem3_Lift_Off

Wet Benches

Axima

Lift_Off

View

E93_S06_Chem3_Removers

Wet Benches

Axima

Removers_NMP_EBRPG

View

Eberle_polymer_XL125

Thermal processes

Eberle

XL125

View

Ecopia_Hall_Effect

Electrical characterization

Ecopia

n080A(inv)

View

ESCIL_Polishing_system_300_GTL

Polishing

ESCIL

300_GTL

View

EVG_ Double_Side_EVG620

Optical lithography

EVG

EVG620

View

EVG_Bonder_EVG501

Back end / direct bonding

EVG

Bonder_EVG501

View

EVG_DeepUV_EVG620

Optical lithography

EVG

EVG620

View

EVG_Spray_Coater_EV101

Optical lithography

EVG

EV101

View

FEI_SEM_Magellan_400L

Scanning electron microscopy

FEI

SEM_Magellan_400L

View

FEI_SEM_Verios_G4_HP

Scanning electron microscopy

FEI

Verios_G4_HP

View

Fizeau_interferometer

Physico-Chemical Characterization

Fizeau

View

Fogale_C2N_M3D

Physico-Chemical Characterization

Fogale_Nanotech_C2N

M3D

View

Fogale_ZoomSurf_3D

Physico-Chemical Characterization

Fogale_Nanotech

ZoomSurf_3D

View

FSM_500_TC

Physico-Chemical Characterization

FSM

500_TC

View

FTIR_Varian_Large_sample

Physico-Chemical Characterization

Varian

670_IR_Large_samples

View

FTIR_Varian_small_sample

Physico-Chemical Characterization

VArian

670_IR_small_samples

View

GILD

Epitaxy

Home made

View

Hall_Effect_Magneto_resistance

Electrical characterization

n5057A(inv)

View

Heidelberg_66_fs

Focused beam lithography

Heidelberg

DWL 66 fs

View

Hitachi_SEM_S3600

Scanning electron microscopy

Hitachi

S3600

View

Hitachi_SEM_S4800

Scanning electron microscopy

Hitachi

S4800

View

Hitachi_SEM_SU8000

Scanning electron microscopy

Hitachi

SU8000

View

Homemade_Bonder_Anodic

Back end / direct bonding

Homemade

View

Homemade_RTA

Thermal processes

Homemade

RTA

View

ICP Sentech SI500 Fluor

Dry etching

Sentech

Si500

View

Jandel_4pointes_ligne_01

Electrical characterization

Jandell

n5055A(inv)

View

Jandell_4pointes_carre_01

Electrical characterization

Jandell

n5056A(inv)

View

JFP_FlipChip_PP6

Device mounting

JFP_MICROTECHNIC

PP6

View

JFP_Pick_and_Place_PP6

Device mounting

JFP_MICROTECHNIC

PP6

View

JFP_Wirebonder_WB100

Back end / wire bonding

JFP MICROTECHNIC

WB100

View

JFP_WireBonder_WB200

Back end / wire bonding

JFP MICROTECHNIC

WB100

View

Jipelec_RTA_Jetfirst_100

Thermal processes

Jipelec

Jetfirst100

View

Jobin_Yvon_Ellipsometer_Uvisel2

Physico-Chemical Characterization

Jobin_Yvon

Uvisel2

View

K&S_Wirebonder_4523

Back end / wire bonding

Kulicke&Soffa

4523

View

Karlsuss_Scriber_InP_GaAs

Device mounting

Karlsuus

Scriber_InP_GaAs

View

M3D_Lareg_Field

Physico-Chemical Characterization

C2N

M3D

View

MBE 2DEG

Epitaxy

Veeco-Riber

GenII

View

MBE III-V

Epitaxy

Riber

Compact21

View

MBE Nanofils III-V

Epitaxy

Riber

R32

View

MBE NW nitrures

Epitaxy

Riber

Compact12

View

MBE spintronique

Epitaxy

Riber

R2300

View

MOVPE

Alternative and emergent lithography

Aixtron

Pegas

View

MOVPE III-V

Epitaxy

EMCORE

VEECO D180 TURBODISK REACTOR

View

Nano_Imp_EVG620

Alternative and emergent lithography

EVG

EVG620

View

Nanobeam_NB4

Focused beam lithography

Nanobeam

NB4

View

Nanonex_NR2500

Alternative and emergent lithography

Nanonex

NR 2500

View

Nanonex_Ultra100

Alternative and emergent lithography

Nanonex

Ultra 100

View

Nanoplas_Descum

Dry etching

Nanoplas

View

Nanoscribe

Alternative and emergent lithography

Nanoscribe

View

Nextral_RIE_Fluorée1_NE100_63

Dry etching

Nextral

NE_100_63

View

Nextral_RIE_Fluorée2_NE100_73

Dry etching

Nextral

NE100_73

View

Nextral_RIE_SiCl4_NE100_56

Dry etching

Nextral

NE100_56

View

PANalytical XPert'M Pro MRD

X-Ray Diffraction

PANalytical

XPert Pro MRD DY1890

View

PANalytical XPert'O Pro MRD

X-Ray Diffraction

PANalytical

XPert Pro MRD DY1905

View

Philips_SEM_XL30

Scanning electron microscopy

Philips

XL_30

View

Photovoltaique

Plasma deposition

C2N

E1404

View

Plasmos_SD2300

Physico-Chemical Characterization

Plasmos

SD2300

View

Plassys_Co_Evap_MEB_800

Metallic thin film deposition

Plassys

Co_Evap_MEB_800

View

Plassys_Evap_IAD_MEB_800

Dielectric thin film deposition

Plassys

Evap_IAD_MEB_800

View

Plassys_Evap_MEB_300S_formation

Metallic thin film deposition

Plassys

Evap_MEB_300S_formation

View

Plassys_Evap_MEB_400

Metallic thin film deposition

Plassys

Evap_MEB_400

View

Plassys_Evap_MEB_550S

Metallic thin film deposition

Plassys

MEB_550S

View

Plassys_Evap_MEB_550SL

Metallic thin film deposition

Plassys

Evap_MEB_550SL

View

Plassys_Evap_MEB_550SLX

Metallic thin film deposition

Plassys

Evap_MEB_550SLX

View

Plassys_Sputter_MP_700S

Metallic thin film deposition

Plassys

Sputter_MP_700S

View

Plassys_Sputter_MP800

Dielectric thin film deposition

Plassys

Sputter_MP800

View

PLD_oxyde

Plasma deposition

Home Made

View

POEM_Cluster_XPS

Epitaxy

Home made

View

Polishing_Metallo_200mm

Polishing

Metallo

200mm

View

Polishing_system_400mm²_P400

Polishing

View

PRESI_Polishing_Mecapol_P320_01

Polishing

PRESI

Mecapol_P320

View

PRESI_Polishing_Mecapol_P320_02

Polishing

PRESI

Mecapol_P320

View

Prober_MP25_IV_formation

Formation_Caracterisation

C2N

E1405

View

Prober_PM5

Electrical characterization

Agilent

PM5

View

Prober_PM8

Electrical characterization

Prober

PM8

View

Prober_rond_CV_formation

Electrical characterization

Homemade

n5052a(inv)

View

Prober_SOM4_IV_formation

Electrical characterization

Karl_Suss

SOM4

View

Raith_C2N_NanoFiB_150

Focused Ion Beam

Raith_C2N

NanoFib_150

View

Raith_EBPG_5000+

Focused beam lithography

Raith

EPBG5000+

View

Raith_EBPG5200

Focused beam lithography

Raith

EBPG5200

View

Raith150

Focused beam lithography

Raith

Raith150

View

RIGAKU Smartlab

X-Ray Diffraction

RIGAKU Smartlab

View

Roth&Rau_IBE_01_SIMS

Dry etching

Roth&Rau

IBE_01_SIMS

View

Roth&Rau_IBE_02

Dry etching

Roth&Rau

IBE_02

View

Sartorius_microbalance

Physico-Chemical Characterization

Sartorius

059

View

Sentech_400

Physico-Chemical Characterization

Sentech

400

View

Sentech_ICP_Cl2_Si500

Dry etching

Senetch

SI500

View

Sentech_ICP_Cl2_Si500S

Dry etching

Sentech

Si500S

View

Sentech_RM2000

Physico-Chemical Characterization

Sentech

RM2000

View

SOPRA_GES_5

Physico-Chemical Characterization

SOPRA

GES_5

View

Specac_presse

Alternative and emergent lithography

Specac

presse

View

Spray_developper_01

Optical lithography

Spray developper 1

View

Spray_developper_02

Optical lithography

Sapr developper 2

View

SPTS_ICP_Fluor_Rapier

Dry etching

SPTS

Rapier

View

Sputtering

Plasma deposition

Home Made

View

Struers_Polishing_Labopol5

Polishing

Struers

Labopol5

View

STS_ICP_Cl2_SR

Dry etching

STS

View

STS_ICP_Fluor_Multiplex_HRM

Dry etching

STS

Multiplex HRM

View

STS_RIE_Fluor_320PC

Dry etching

STS

320PC

View

Suss_Bonder_SB6

Back end / direct bonding

Suss

Bonder_SB6

View

Suss_MA6

Optical lithography

Suss

MA6

View

Suss_Microtec_Scriber_HR100

Device mounting

Suss_Microtec

HR100

View

Suss_MJB3_01

Optical lithography

Suss

Mjb3

View

Suss_MJB3_02

Optical lithography

Suss

Mjb3

View

Suss_MJB4_01

Optical lithography

Suss

Mjb4

View

Suss_MJB4_02

Optical lithography

Suss

Mjb4

View

Tencor_alphastep_carac

Physico-Chemical Characterization

Tencor

Alphastep

View

Tencor_alphastep_litho

Physico-Chemical Characterization

Tencor

Alphastep

View

Test tool

Metrology

Testbolaget

View

Thermal_Camera

Physico-Chemical Characterization

View

Unaxis_PECVD_ND200

Dielectric thin film deposition

Unaxis

PECVD_ND200

View

Veeco_Dektak08

Physico-Chemical Characterization

Veeco

Dektak08

View

Veeco_Dektak08_formation

Physico-Chemical Characterization

Veeco

Dektak08

View

Vegatech_Tube_A1_Wet_Oxyde

Thermal processes

Vegatech

Tube_A1_Wet_Oxyde

View

Vegatech_Tube_A2_Dry_Oxyde

Thermal processes

Vegatech

Tube_A2_Dry_Oxyde

View

Vegatech_Tube_B1_Dielectric

Thermal processes

Vegatech

Tube_B1_Dielectric

View

Vegatech_Tube_B2_Metal

Thermal processes

Vegatech

Tube_B2_Metal

View

Vinci_Co_Sputter_NbAl

Metallic thin film deposition

Vinci

Vinci_Co_Sputter_Al

View

Vinci_Co_Sputter_NbSi

Metallic thin film deposition

Vinci

Co_Sputter_NbSi

View

Woolam_M2000XI

Physico-Chemical Characterization

Woolam

M2000XI

View

Xactix_XeF2_Xetch_e1_series

Dry etching

Xactix

Xetch_e1_series

View

Zeiss_FIB_He_Orion

Focused beam lithography

Zeiss

FIB HE Orion

View

Zeiss_SEM_LEO_1430

Scanning electron microscopy

Zeiss

LEO_1430

View

zzoutil_test

Device mounting

personne

2017

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