Picture of Nextral_RIE_Fluorée1_NE100_63
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Laurence Ferlazzo
2nd Responsible:
Files
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Description
Details
Tool name:
Nextral_RIE_Fluorée1_NE100_63
Area/room:
Attaque sèche/Gravure 4
Category:
Dry etching
Manufacturer:
Nextral
Model:
NE_100_63
Process info

Materials allowed in this equipment :

All materials.

Instructors & Licensed Users

Instructors

Licensed Users

Tool Modes
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