LIMS - [View Tool]

No access? Apply for access here...

Login

Username:

Password:

Forgot your password?

EVG_DeepUV_EVG620 (LUV03__)

Picture of EVG_DeepUV_EVG620

Current status:

AVAILABLE

Book | Log|

Show/Collapse all

Responsibles

1st Responsible:

David Bouville

2nd Responsible:

Files

You must be logged in to view files.

Description

Details

Tool name:

EVG_DeepUV_EVG620

Area/room:

[Not defined]

Category:

Optical lithography

Manufacturer:

EVG

Model:

EVG620

Instructors & Licensed Users

Instructors

Licensed Users

Tool Modes

You must be logged in to view tool modes.