Picture of Tencor_alphastep_litho
Current status:
DOWN
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Responsibles
1st Responsible:
Abdelmounaim Harouri
2nd Responsible:
Cédric Villebasse
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Description
Details
Tool name:
Tencor_alphastep_litho
Area/room:
[Not defined]
Category:
Physico-Chemical Characterization
Manufacturer:
Tencor
Model:
Alphastep
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