Picture of Alcatel_Evap_BEL_310
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Laetitia Leroy
2nd Responsible:
Laurent Couraud
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Description
Details
Tool name:
Alcatel_Evap_BEL_310
Area/room:
Dépôt métaux2
Category:
Metallic thin film deposition
Manufacturer:
Alcatel
Model:
Evap_BEL_310
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