Picture of Heidelberg_66_fs
Current status:
DOWN
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Responsibles
1st Responsible:
David Bouville
2nd Responsible:
Nathalie Bardou
Files
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Description
Details
Tool name:
Heidelberg_66_fs
Area/room:
Lithographie UV1
Category:
Focused beam lithography
Manufacturer:
Heidelberg
Model:
DWL 66 fs
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