Picture of ApSy_PECVD_Multiplex_V1
Current status:
DOWN
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Responsibles
1st Responsible:
François Maillard
2nd Responsible:
Alan Durnez
Files
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Description
Details
Tool name:
ApSy_PECVD_Multiplex_V1
Area/room:
[Not defined]
Category:
Dielectric thin film deposition
Manufacturer:
ApSy
Model:
PECVD_Multiplex_V1
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Instructors

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Tool Modes
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