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Plassys_Evap_MEB_400 (MeD12__)
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Laetitia Leroy
2nd Responsible:
Alan Durnez
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Description
Métaux disponibles Ti Au Cu et Ni
Details
Tool name:
Plassys_Evap_MEB_400
Area/room:
Dépôt métaux2
Category:
Metallic thin film deposition
Manufacturer:
Plassys
Model:
Evap_MEB_400
Process info
Métaux disponibles Ti Au Cu et Ni
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