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ICP Sentech SI500 Fluor (Dry19__)

Picture of ICP Sentech SI500 Fluor

Current status:

AVAILABLE

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Responsibles

1st Responsible:

Samson Edmond

2nd Responsible:

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Description

Details

Tool name:

ICP Sentech SI500 Fluor

Area/room:

Attaque sèche/Gravure 3

Category:

Dry etching

Manufacturer:

Sentech

Model:

Si500

Instructors & Licensed Users

Instructors

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Tool Modes

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