Picture of Suss_MA6
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Abdelmounaim Harouri
2nd Responsible:
Christophe Dupuis
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Description
Details
Tool name:
Suss_MA6
Area/room:
[Not defined]
Category:
Optical lithography
Manufacturer:
Suss
Model:
MA6
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Tool Modes
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