Picture of MOVPE III-V
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Grégoire BEAUDOIN
2nd Responsible:
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Description

VERSATILE GAS PANEL

12 ORGANOMETALLIC AND 7 HYDRIDE SOURCES

Complete set of precursors for GaAs and InP based photonic devices and SiGeSn materials

  • 8 double dilution lines

  • Group V precursors:

    2xAsH3, 2xPH3

  • N-type dopants:

    Si2H6, H2S

  • Group IV precursors:

    Ge2H6, IBuGe, SiH4

  • Group IV precursors:

    Ge2H6, IBuGe, SiH4, SnCl4

  • P-type dopants:

    DeZn

Details
Tool name:
MOVPE III-V
Area/room:
[Not defined]
Category:
Epitaxy
Manufacturer:
EMCORE
Model:
VEECO D180 TURBODISK REACTOR
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