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Nano_Imp_EVG620 (AEL03__)

Picture of Nano_Imp_EVG620

Current status:

AVAILABLE

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Responsibles

1st Responsible:

Frédéric Hamouda

2nd Responsible:

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Description

Details

Tool name:

Nano_Imp_EVG620

Area/room:

[Not defined]

Category:

Alternative and emergent lithography

Manufacturer:

EVG

Model:

EVG620

Instructors & Licensed Users

Instructors

Licensed Users

Tool Modes

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