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Alcatel_Evap_SCM_600 (MeD08__)
Current status:
DOWN
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Responsibles
1st Responsible:
Laurent Couraud
2nd Responsible:
Laetitia Leroy
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Description
Details
Tool name:
Alcatel_Evap_SCM_600
Area/room:
Dépôt métaux3
Category:
Metallic thin film deposition
Manufacturer:
Alcatel
Model:
Evap_SCM_600
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