Picture of STS_RIE_Fluor_320PC
Current status:
DOWN
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Responsibles
1st Responsible:
Samson Edmond
2nd Responsible:
François Maillard
Files
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Description
Details
Tool name:
STS_RIE_Fluor_320PC
Area/room:
Attaque sèche/Gravure 3
Category:
Dry etching
Manufacturer:
STS
Model:
320PC
Instructors & Licensed Users

Instructors

Licensed Users

Process Lines
process micro miroir
Tool Modes
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