Picture of STS_ICP_Fluor_Multiplex_HRM
Current status:
DOWN
Book | Log| 
Show/Collapse all

Responsibles
1st Responsible:
Xavier Le Roux
2nd Responsible:
Benoit Belier
Files
You must be logged in to view files.
Description
Details
Tool name:
STS_ICP_Fluor_Multiplex_HRM
Area/room:
Attaque sèche/Gravure 4
Category:
Dry etching
Manufacturer:
STS
Model:
Multiplex HRM
Instructors & Licensed Users

Instructors

Licensed Users

Process Lines
process micro miroir
Tool Modes
You must be logged in to view tool modes.