Picture of Xactix_XeF2_Xetch_e1_series
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Samson Edmond
2nd Responsible:
Etienne Herth
Files
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Description
Details
Tool name:
Xactix_XeF2_Xetch_e1_series
Area/room:
[Not defined]
Category:
Dry etching
Manufacturer:
Xactix
Model:
Xetch_e1_series
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Instructors

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Tool Modes
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