Picture of Sentech_ICP_Cl2_Si500
Current status:
AVAILABLE
Book | Log| 
Show/Collapse all

Responsibles
1st Responsible:
Laurence Ferlazzo
2nd Responsible:
Feriel Laourine
Files
You must be logged in to view files.
Description
Details
Tool name:
Sentech_ICP_Cl2_Si500
Area/room:
[Not defined]
Category:
Dry etching
Manufacturer:
Senetch
Model:
SI500
Instructors & Licensed Users

Instructors

Licensed Users

Tool Modes
You must be logged in to view tool modes.